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【英文标准名称】:StandardPracticeforContinuousSizingandCountingofAirborneParticlesinDust-ControlledAreasandCleanRoomsUsingInstrumentsCapableofDetectingSingleSub-MicrometreandLargerParticles
【原文标准名称】:用可探测单个亚微米及较大粒子的仪器在灰尘控制区域和无菌室中连续测定空气中粒子的大小及计数用标准实施规程
【标准号】:ASTMF50-2007
【标准状态】:现行
【国别】:
【发布日期】:2007
【实施或试行日期】:
【发布单位】:美国材料与试验协会(US-ASTM)
【起草单位】:E21.05
【标准类型】:(Practice)
【标准水平】:()
【中文主题词】:空气质量;分类;计数;灰尘控制;灰尘测量;电子工程;粒状物;工艺;试验设备
【英文主题词】:airsampling;airborneparticles;particlecounting;particlesizedistribution;particles
【摘要】:1.1Thispracticecoversthedeterminationoftheparticleconcentration,bynumber,andthesizedistributionofairborneparticlesindust-controlledareasandcleanrooms,forparticlesinthesizerangeofapproximately0.01to5.0m.Particleconcentrationsnotexceeding3.5106particles/m3(100000/ft3)arecoveredforallparticlesequaltoandlargerthantheminimumsizemeasured.1.2Thispracticeusesanairbornesingleparticlecountingdevice(SPC)whoseoperationisbasedonmeasuringthesignalproducedbyanindividualparticlepassingthroughthesensingzone.Thesignalmustbedirectlyorindirectlyrelatedtoparticlesize.Note1TheSPCtypeisnotspecifiedhere.TheSPCcanbeaconventionalopticalparticlecounter(OPC),anaerodynamicparticlesizer,acondensationnucleuscounter(CNC)operatinginconjunctionwithadiffusionbatteryordifferentialmobilityanalyzer,oranyotherdevicecapableofcountingandsizingsingleparticlesinthesizerangeofconcernandofsamplinginacleanroomenvironment.1.3IndividualsperformingtestsinaccordancewiththispracticeshallbetrainedinuseoftheSPCandshallunderstanditsoperation.1.4Sincetheconcentrationandtheparticlesizedistributionofairborneparticlesaresubjecttocontinuousvariations,thechoiceofsamplingprobeconfiguration,locationsandsamplingtimeswillaffectsamplingresults.Further,thedifferencesinthephysicalmeasurement,electronicandsamplehandlingsystemsbetweenthevariousSPCsandthedifferencesinphysicalpropertiesofthevariousparticlesbeingmeasuredcancontributetovariationsinthetestresults.Thesedifferencesshouldberecognizedandminimizedbyusingastandardmethodofprimarycalibrationandbyminimizingvariabilityofsampleacquisitionprocedures.1.5Sampleacquisitionproceduresandequipmentmaybeselectedforspecificapplicationsbasedonvaryingcleanroomclasslevels.Firmrequirementsfortheseselectionsarebeyondthescopeofthispractice;however,samplingpracticesshallbestatedthattakeintoaccountpotentialspatialandstatisticalvariationsofsuspendedparticlesincleanrooms.GeneralreferencestocleanroomclassificationsfollowFederalStandard209E,latestrevision.Whereairborneparticlesaretobecharacterizedindust-controlledareasthatdonotmeettheseclassifications,thelatestrevisionofthepertinentspecificationfortheseareasshallbeused.Thisstandarddoesnotpurporttoaddressallofthesafetyconcerns,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatorylimitationspriortouse.Forspecifichazardsstatements,seeSection8.
【中国标准分类号】:C72
【国际标准分类号】:13_040_30
【页数】:6P.;A4
【正文语种】: